Standard

BN coatings deposition by magnetron sputtering of B and BN targets in electron beam generated plasma. / Kamenetskikh, A. S.; Gavrilov, N. V.; Koryakova, O. V. и др.
в: Journal of Physics: Conference Series, Том 857, № 1, 012017, 01.06.2017.

Результаты исследований: Вклад в журнал › Статья › Рецензирование

Harvard

Kamenetskikh, AS, Gavrilov, NV, Koryakova, OV & Cholakh, SO 2017, 'BN coatings deposition by magnetron sputtering of B and BN targets in electron beam generated plasma', Journal of Physics: Conference Series, Том. 857, № 1, 012017. https://doi.org/10.1088/1742-6596/857/1/012017

APA

Kamenetskikh, A. S., Gavrilov, N. V., Koryakova, O. V., & Cholakh, S. O. (2017). BN coatings deposition by magnetron sputtering of B and BN targets in electron beam generated plasma. Journal of Physics: Conference Series, 857(1), [012017]. https://doi.org/10.1088/1742-6596/857/1/012017

Vancouver

Kamenetskikh AS, Gavrilov NV, Koryakova OV, Cholakh SO. BN coatings deposition by magnetron sputtering of B and BN targets in electron beam generated plasma. Journal of Physics: Conference Series. 2017 июнь 1;857(1):012017. doi: 10.1088/1742-6596/857/1/012017

Author

Kamenetskikh, A. S. ; Gavrilov, N. V. ; Koryakova, O. V. и др. / BN coatings deposition by magnetron sputtering of B and BN targets in electron beam generated plasma. в: Journal of Physics: Conference Series. 2017 ; Том 857, № 1.

BibTeX

@article{2d1465ae0f5b4af384935219ed130939,
title = "BN coatings deposition by magnetron sputtering of B and BN targets in electron beam generated plasma",
author = "Kamenetskikh, {A. S.} and Gavrilov, {N. V.} and Koryakova, {O. V.} and Cholakh, {S. O.}",
year = "2017",
month = jun,
day = "1",
doi = "10.1088/1742-6596/857/1/012017",
language = "English",
volume = "857",
journal = "Journal of Physics: Conference Series",
issn = "1742-6588",
publisher = "Institute of Physics Publishing",
number = "1",

}

RIS

TY - JOUR

T1 - BN coatings deposition by magnetron sputtering of B and BN targets in electron beam generated plasma

AU - Kamenetskikh, A. S.

AU - Gavrilov, N. V.

AU - Koryakova, O. V.

AU - Cholakh, S. O.

PY - 2017/6/1

Y1 - 2017/6/1

UR - http://www.scopus.com/inward/record.url?scp=85021327746&partnerID=8YFLogxK

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000412709600017

U2 - 10.1088/1742-6596/857/1/012017

DO - 10.1088/1742-6596/857/1/012017

M3 - Article

AN - SCOPUS:85021327746

VL - 857

JO - Journal of Physics: Conference Series

JF - Journal of Physics: Conference Series

SN - 1742-6588

IS - 1

M1 - 012017

ER -

ID: 1932102