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Analysis of TiAlSiN Coatings Deposited by Reactive Magnetron Sputtering under High-Current Ion Assistance. / Gavrilov, N. V.; Kamenetskikh, A. S.; Chukin, A. V.
в: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Том 11, № 3, 05.2017, стр. 671-676.

Результаты исследований: Вклад в журнал › Статья › Рецензирование

Harvard

Gavrilov, NV, Kamenetskikh, AS & Chukin, AV 2017, 'Analysis of TiAlSiN Coatings Deposited by Reactive Magnetron Sputtering under High-Current Ion Assistance', Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, Том. 11, № 3, стр. 671-676. https://doi.org/10.1134/S1027451017030272

APA

Gavrilov, N. V., Kamenetskikh, A. S., & Chukin, A. V. (2017). Analysis of TiAlSiN Coatings Deposited by Reactive Magnetron Sputtering under High-Current Ion Assistance. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques, 11(3), 671-676. https://doi.org/10.1134/S1027451017030272

Vancouver

Gavrilov NV, Kamenetskikh AS, Chukin AV. Analysis of TiAlSiN Coatings Deposited by Reactive Magnetron Sputtering under High-Current Ion Assistance. Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 2017 май;11(3):671-676. doi: 10.1134/S1027451017030272

Author

Gavrilov, N. V. ; Kamenetskikh, A. S. ; Chukin, A. V. / Analysis of TiAlSiN Coatings Deposited by Reactive Magnetron Sputtering under High-Current Ion Assistance. в: Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 2017 ; Том 11, № 3. стр. 671-676.

BibTeX

@article{ae32012260bb47cb877be4217081d885,
title = "Analysis of TiAlSiN Coatings Deposited by Reactive Magnetron Sputtering under High-Current Ion Assistance",
keywords = "TiAlSiN coatings, reactive magnetron sputtering, ion assistance, electron beam, X-ray phase analysis, internal stresses, NANOCOMPOSITE COATINGS, TIN FILMS, SI, BOMBARDMENT",
author = "Gavrilov, {N. V.} and Kamenetskikh, {A. S.} and Chukin, {A. V.}",
year = "2017",
month = may,
doi = "10.1134/S1027451017030272",
language = "English",
volume = "11",
pages = "671--676",
journal = "Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques",
issn = "1027-4510",
publisher = "Pleiades Publishing",
number = "3",

}

RIS

TY - JOUR

T1 - Analysis of TiAlSiN Coatings Deposited by Reactive Magnetron Sputtering under High-Current Ion Assistance

AU - Gavrilov, N. V.

AU - Kamenetskikh, A. S.

AU - Chukin, A. V.

PY - 2017/5

Y1 - 2017/5

KW - TiAlSiN coatings

KW - reactive magnetron sputtering

KW - ion assistance

KW - electron beam

KW - X-ray phase analysis

KW - internal stresses

KW - NANOCOMPOSITE COATINGS

KW - TIN FILMS

KW - SI

KW - BOMBARDMENT

UR - http://www.scopus.com/inward/record.url?scp=85020537812&partnerID=8YFLogxK

UR - https://elibrary.ru/item.asp?id=31023068

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000403352400034

U2 - 10.1134/S1027451017030272

DO - 10.1134/S1027451017030272

M3 - Article

VL - 11

SP - 671

EP - 676

JO - Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques

JF - Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques

SN - 1027-4510

IS - 3

ER -

ID: 1927129