Research output: Contribution to journal › Article › peer-review
Research output: Contribution to journal › Article › peer-review
}
TY - JOUR
T1 - Analysis of TiAlSiN Coatings Deposited by Reactive Magnetron Sputtering under High-Current Ion Assistance
AU - Gavrilov, N. V.
AU - Kamenetskikh, A. S.
AU - Chukin, A. V.
PY - 2017/5
Y1 - 2017/5
KW - TiAlSiN coatings
KW - reactive magnetron sputtering
KW - ion assistance
KW - electron beam
KW - X-ray phase analysis
KW - internal stresses
KW - NANOCOMPOSITE COATINGS
KW - TIN FILMS
KW - SI
KW - BOMBARDMENT
UR - http://www.scopus.com/inward/record.url?scp=85020537812&partnerID=8YFLogxK
UR - https://elibrary.ru/item.asp?id=31023068
UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000403352400034
U2 - 10.1134/S1027451017030272
DO - 10.1134/S1027451017030272
M3 - Article
VL - 11
SP - 671
EP - 676
JO - Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
JF - Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
SN - 1027-4510
IS - 3
ER -
ID: 1927129