Analysis of TiAlSiN Coatings Deposited by Reactive Magnetron Sputtering under High-Current Ion Assistance

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	671-676
Number of pages	6
Journal	Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques
Volume	11
Issue number	3
DOIs	https://doi.org/10.1134/S1027451017030272
Publication status	Published - May 2017

TiAlSiN coatings, reactive magnetron sputtering, ion assistance, electron beam, X-ray phase analysis, internal stresses, NANOCOMPOSITE COATINGS, TIN FILMS, SI, BOMBARDMENT

ID: 1927129