Standard
Harvard
Kaliekperov, M, Kozlovskiy, A, Shlimas, D, Kenzhina, I
, Ivanov, I, Kozin, S, Aleksandrenko, V, Kurakhmedov, A, Sambaev, E, Seitbaev, A
, Zdorovets, M & Kadyrzhanov, K 2018, '
The study of changes in structural properties of Cu films under ionizing radiation',
Materials Research Express, Том. 5, № 5, 055008.
https://doi.org/10.1088/2053-1591/aabf76
APA
Kaliekperov, M., Kozlovskiy, A., Shlimas, D., Kenzhina, I.
, Ivanov, I., Kozin, S., Aleksandrenko, V., Kurakhmedov, A., Sambaev, E., Seitbaev, A.
, Zdorovets, M., & Kadyrzhanov, K. (2018).
The study of changes in structural properties of Cu films under ionizing radiation.
Materials Research Express,
5(5), [055008].
https://doi.org/10.1088/2053-1591/aabf76
Vancouver
Author
BibTeX
@article{1e7819eb3f04463a9e13f0200b4e6c0a,
title = "The study of changes in structural properties of Cu films under ionizing radiation",
keywords = "effect of irradiation, Cu films, irradiation effect, structural properties, ATOMIC LAYER DEPOSITION, COPPER NANOFILMS, TOLERANCE, SIZE",
author = "M. Kaliekperov and A. Kozlovskiy and D. Shlimas and I. Kenzhina and I. Ivanov and S. Kozin and V. Aleksandrenko and A. Kurakhmedov and E. Sambaev and A. Seitbaev and M. Zdorovets and K. Kadyrzhanov",
year = "2018",
month = may,
doi = "10.1088/2053-1591/aabf76",
language = "English",
volume = "5",
journal = "Materials Research Express",
issn = "2053-1591",
publisher = "Institute of Physics Publishing (IOP)",
number = "5",
}
RIS
TY - JOUR
T1 - The study of changes in structural properties of Cu films under ionizing radiation
AU - Kaliekperov, M.
AU - Kozlovskiy, A.
AU - Shlimas, D.
AU - Kenzhina, I.
AU - Ivanov, I.
AU - Kozin, S.
AU - Aleksandrenko, V.
AU - Kurakhmedov, A.
AU - Sambaev, E.
AU - Seitbaev, A.
AU - Zdorovets, M.
AU - Kadyrzhanov, K.
PY - 2018/5
Y1 - 2018/5
KW - effect of irradiation
KW - Cu films
KW - irradiation effect
KW - structural properties
KW - ATOMIC LAYER DEPOSITION
KW - COPPER NANOFILMS
KW - TOLERANCE
KW - SIZE
UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000431403200008
UR - http://www.scopus.com/inward/record.url?scp=85047855708&partnerID=8YFLogxK
UR - https://elibrary.ru/item.asp?id=35484561
U2 - 10.1088/2053-1591/aabf76
DO - 10.1088/2053-1591/aabf76
M3 - Article
VL - 5
JO - Materials Research Express
JF - Materials Research Express
SN - 2053-1591
IS - 5
M1 - 055008
ER -