Standard

The study of changes in structural properties of Cu films under ionizing radiation. / Kaliekperov, M.; Kozlovskiy, A.; Shlimas, D. et al.
In: Materials Research Express, Vol. 5, No. 5, 055008, 05.2018.

Research output: Contribution to journal › Article › peer-review

Harvard

Kaliekperov, M, Kozlovskiy, A, Shlimas, D, Kenzhina, I, Ivanov, I, Kozin, S, Aleksandrenko, V, Kurakhmedov, A, Sambaev, E, Seitbaev, A, Zdorovets, M & Kadyrzhanov, K 2018, 'The study of changes in structural properties of Cu films under ionizing radiation', Materials Research Express, vol. 5, no. 5, 055008. https://doi.org/10.1088/2053-1591/aabf76

APA

Kaliekperov, M., Kozlovskiy, A., Shlimas, D., Kenzhina, I., Ivanov, I., Kozin, S., Aleksandrenko, V., Kurakhmedov, A., Sambaev, E., Seitbaev, A., Zdorovets, M., & Kadyrzhanov, K. (2018). The study of changes in structural properties of Cu films under ionizing radiation. Materials Research Express, 5(5), [055008]. https://doi.org/10.1088/2053-1591/aabf76

Vancouver

Kaliekperov M, Kozlovskiy A, Shlimas D, Kenzhina I, Ivanov I, Kozin S et al. The study of changes in structural properties of Cu films under ionizing radiation. Materials Research Express. 2018 May;5(5):055008. doi: 10.1088/2053-1591/aabf76

Author

Kaliekperov, M. ; Kozlovskiy, A. ; Shlimas, D. et al. / The study of changes in structural properties of Cu films under ionizing radiation. In: Materials Research Express. 2018 ; Vol. 5, No. 5.

BibTeX

@article{1e7819eb3f04463a9e13f0200b4e6c0a,
title = "The study of changes in structural properties of Cu films under ionizing radiation",
keywords = "effect of irradiation, Cu films, irradiation effect, structural properties, ATOMIC LAYER DEPOSITION, COPPER NANOFILMS, TOLERANCE, SIZE",
author = "M. Kaliekperov and A. Kozlovskiy and D. Shlimas and I. Kenzhina and I. Ivanov and S. Kozin and V. Aleksandrenko and A. Kurakhmedov and E. Sambaev and A. Seitbaev and M. Zdorovets and K. Kadyrzhanov",
year = "2018",
month = may,
doi = "10.1088/2053-1591/aabf76",
language = "English",
volume = "5",
journal = "Materials Research Express",
issn = "2053-1591",
publisher = "Institute of Physics Publishing (IOP)",
number = "5",

}

RIS

TY - JOUR

T1 - The study of changes in structural properties of Cu films under ionizing radiation

AU - Kaliekperov, M.

AU - Kozlovskiy, A.

AU - Shlimas, D.

AU - Kenzhina, I.

AU - Ivanov, I.

AU - Kozin, S.

AU - Aleksandrenko, V.

AU - Kurakhmedov, A.

AU - Sambaev, E.

AU - Seitbaev, A.

AU - Zdorovets, M.

AU - Kadyrzhanov, K.

PY - 2018/5

Y1 - 2018/5

KW - effect of irradiation

KW - Cu films

KW - irradiation effect

KW - structural properties

KW - ATOMIC LAYER DEPOSITION

KW - COPPER NANOFILMS

KW - TOLERANCE

KW - SIZE

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000431403200008

UR - http://www.scopus.com/inward/record.url?scp=85047855708&partnerID=8YFLogxK

UR - https://elibrary.ru/item.asp?id=35484561

U2 - 10.1088/2053-1591/aabf76

DO - 10.1088/2053-1591/aabf76

M3 - Article

VL - 5

JO - Materials Research Express

JF - Materials Research Express

SN - 2053-1591

IS - 5

M1 - 055008

ER -

ID: 7281997