The study of changes in structural properties of Cu films under ionizing radiation › Research Explorer

DOI

https://doi.org/10.1088/2053-1591/aabf76
Final published version

M. Kaliekperov
A. Kozlovskiy
D. Shlimas
I. Kenzhina
I. Ivanov
S. Kozin
V. Aleksandrenko
A. Kurakhmedov
E. Sambaev
A. Seitbaev
M. Zdorovets
K. Kadyrzhanov

Original language	English
Article number	055008
Number of pages	8
Journal	Materials Research Express
Volume	5
Issue number	5
DOIs	https://doi.org/10.1088/2053-1591/aabf76
Publication status	Published - May 2018

ASJC Scopus subject areas

Electronic, Optical and Magnetic Materials
Biomaterials
Surfaces, Coatings and Films
Polymers and Plastics
Metals and Alloys

WoS ResearchAreas Categories

Materials Science, Multidisciplinary

Research areas

effect of irradiation, Cu films, irradiation effect, structural properties, ATOMIC LAYER DEPOSITION, COPPER NANOFILMS, TOLERANCE, SIZE

ID: 7281997