The development of a method of generation of uniform plasma in low-pressure glow discharges with oscillating electrons was discussed. On the separation of the cathode into several elements, with potentials of the parts being different, the method was based. It was shown by the experimental results that the use of the nonequipotential cathode in the Penning system enables effective control of spatial plasma distribution. It was found that the efficiency of ion extraction, defined as the ratio of beam and discharge currents, is equal to 30%.