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Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge. / Menshakov, Andrey I.; Bruhanova, Yulia A.; Kukharenko, Andrey I. и др.
в: Membranes, Том 12, № 3, 321, 03.2022.

Результаты исследований: Вклад в журнал › Статья › Рецензирование

Harvard

Menshakov, AI, Bruhanova, YA, Kukharenko, AI & Zhidkov, IS 2022, 'Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge', Membranes, Том. 12, № 3, 321. https://doi.org/10.3390/membranes12030321

APA

Menshakov, A. I., Bruhanova, Y. A., Kukharenko, A. I., & Zhidkov, I. S. (2022). Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge. Membranes, 12(3), [321]. https://doi.org/10.3390/membranes12030321

Vancouver

Menshakov AI, Bruhanova YA, Kukharenko AI, Zhidkov IS. Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge. Membranes. 2022 март;12(3):321. doi: 10.3390/membranes12030321

Author

Menshakov, Andrey I. ; Bruhanova, Yulia A. ; Kukharenko, Andrey I. и др. / Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge. в: Membranes. 2022 ; Том 12, № 3.

BibTeX

@article{08255963e53344c29113f8fe0be53395,
title = "Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge",
keywords = "anodic evaporation, hollow cathode arc, nanocomposite coatings, PECVD, PVD, TiSiCN, SYSTEM, DEPOSITION, TERNARY, EROSION, MECHANICAL-PROPERTIES, SI-C-N, VAPOR, FILMS, TEMPERATURE, MICROSTRUCTURE",
author = "Menshakov, {Andrey I.} and Bruhanova, {Yulia A.} and Kukharenko, {Andrey I.} and Zhidkov, {Ivan S.}",
note = "Publisher Copyright: {\textcopyright} 2022 by the authors. Licensee MDPI, Basel, Switzerland.",
year = "2022",
month = mar,
doi = "10.3390/membranes12030321",
language = "English",
volume = "12",
journal = "Membranes",
issn = "2077-0375",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "3",

}

RIS

TY - JOUR

T1 - Synthesis of Nanocomposite TiSiCN Coatings by Titanium Evaporation and Organosilicon Compound Activation in Hollow Cathode Arc Discharge

AU - Menshakov, Andrey I.

AU - Bruhanova, Yulia A.

AU - Kukharenko, Andrey I.

AU - Zhidkov, Ivan S.

N1 - Publisher Copyright: © 2022 by the authors. Licensee MDPI, Basel, Switzerland.

PY - 2022/3

Y1 - 2022/3

KW - anodic evaporation

KW - hollow cathode arc

KW - nanocomposite coatings

KW - PECVD

KW - PVD

KW - TiSiCN

KW - SYSTEM

KW - DEPOSITION

KW - TERNARY

KW - EROSION

KW - MECHANICAL-PROPERTIES

KW - SI-C-N

KW - VAPOR

KW - FILMS

KW - TEMPERATURE

KW - MICROSTRUCTURE

UR - http://www.scopus.com/inward/record.url?scp=85126985531&partnerID=8YFLogxK

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000774150100001

U2 - 10.3390/membranes12030321

DO - 10.3390/membranes12030321

M3 - Article

AN - SCOPUS:85126985531

VL - 12

JO - Membranes

JF - Membranes

SN - 2077-0375

IS - 3

M1 - 321

ER -

ID: 29928821