On the basis of classical knowledge about movement of atoms and lattice theory of F.Goodman and G.Wachman the program modeling helium atom interaction with a three-dimensional crystal tungsten lattice taking into account partial surface covering by chemisorbed oxygen atoms is developed. An efficiency of molecular heat exchange of helium for pure and partially chemisorbed tungsten surface is calculated for different temperatures. Similar model of the surface and procedure of calculations have been applied for description of free-molecular gas flow in long cylindrical channel with clean and fully chemisorbed metal surface. Within the limits of the developed approach the results of calculations for both problems agree well with available experiments with surface contamination control.