Standard

Simulation and optimization of silicon-on-sapphire pressure sensor. / Kulesh, N. A.; Kudyukov, E. V.; Balymov, K. G. и др.
Physics, Technologies and Innovation, PTI 2017: Proceedings of the IV International Young Researchers' Conference. Том 1886 American Institute of Physics Inc., 2017. 020013.

Результаты исследований: Глава в книге, отчете, сборнике статей › Материалы конференции › Рецензирование

Harvard

Kulesh, NA, Kudyukov, EV, Balymov, KG & Beloyshov, AA 2017, Simulation and optimization of silicon-on-sapphire pressure sensor. в Physics, Technologies and Innovation, PTI 2017: Proceedings of the IV International Young Researchers' Conference. Том. 1886, 020013, American Institute of Physics Inc., 4th International Young Researchers' Conference: Physics, Technologies and Innovation, PTI 2017, Ekaterinburg, Российская Федерация, 15/05/2017. https://doi.org/10.1063/1.5002910

APA

Kulesh, N. A., Kudyukov, E. V., Balymov, K. G., & Beloyshov, A. A. (2017). Simulation and optimization of silicon-on-sapphire pressure sensor. в Physics, Technologies and Innovation, PTI 2017: Proceedings of the IV International Young Researchers' Conference (Том 1886). [020013] American Institute of Physics Inc.. https://doi.org/10.1063/1.5002910

Vancouver

Kulesh NA, Kudyukov EV, Balymov KG, Beloyshov AA. Simulation and optimization of silicon-on-sapphire pressure sensor. в Physics, Technologies and Innovation, PTI 2017: Proceedings of the IV International Young Researchers' Conference. Том 1886. American Institute of Physics Inc. 2017. 020013 doi: 10.1063/1.5002910

Author

Kulesh, N. A. ; Kudyukov, E. V. ; Balymov, K. G. и др. / Simulation and optimization of silicon-on-sapphire pressure sensor. Physics, Technologies and Innovation, PTI 2017: Proceedings of the IV International Young Researchers' Conference. Том 1886 American Institute of Physics Inc., 2017.

BibTeX

@inproceedings{cdb10f773bfe4c1bae11c9e36987e29a,
title = "Simulation and optimization of silicon-on-sapphire pressure sensor",
author = "Kulesh, {N. A.} and Kudyukov, {E. V.} and Balymov, {K. G.} and Beloyshov, {A. A.}",
year = "2017",
month = sep,
day = "26",
doi = "10.1063/1.5002910",
language = "English",
volume = "1886",
booktitle = "Physics, Technologies and Innovation, PTI 2017",
publisher = "American Institute of Physics Inc.",
address = "United States",
note = "4th International Young Researchers' Conference: Physics, Technologies and Innovation, PTI 2017 ; Conference date: 15-05-2017 Through 19-05-2017",

}

RIS

TY - GEN

T1 - Simulation and optimization of silicon-on-sapphire pressure sensor

AU - Kulesh, N. A.

AU - Kudyukov, E. V.

AU - Balymov, K. G.

AU - Beloyshov, A. A.

PY - 2017/9/26

Y1 - 2017/9/26

UR - http://www.scopus.com/inward/record.url?scp=85031102380&partnerID=8YFLogxK

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000418447300013

U2 - 10.1063/1.5002910

DO - 10.1063/1.5002910

M3 - Conference contribution

AN - SCOPUS:85031102380

VL - 1886

BT - Physics, Technologies and Innovation, PTI 2017

PB - American Institute of Physics Inc.

T2 - 4th International Young Researchers' Conference: Physics, Technologies and Innovation, PTI 2017

Y2 - 15 May 2017 through 19 May 2017

ER -

ID: 2214873