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DOI

The rarefied gas flow through a short channel into a vacuum has been investigated computationally using the direct simulation Monte Carlo method. Taking into account the gas-surface scattering and the gas molecule-molecule interaction, the mass flow rate is calculated as a function of gas rarefaction and the length to height ratio. This study demonstrates that the effects of the gas molecule-molecule interaction and the gas-surface scattering can make a noticeable impact on the mass flow rate of the rarefied gas through a short channel into a vacuum. The maximum manifestation of these effects was evaluated.
Язык оригиналаАнглийский
Страницы (с-по)1393-1398
Число страниц6
ЖурналJournal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Том28
Номер выпуска6
DOI
СостояниеОпубликовано - 1 нояб. 2010

    Предметные области ASJC Scopus

  • Surfaces, Coatings and Films
  • Surfaces and Interfaces
  • Condensed Matter Physics

    Предметные области WoS

  • Материаловедение, Покрытия и пленки
  • Физика, Прикладная

ID: 37843951