Characteristics of the method of deposition of TiN coatings by anodic evaporation of titanium in a low-pressure arc discharge

Characteristics of the method of deposition of TiN coatings by anodic evaporation of titanium in a low-pressure arc discharge. / Bryuhanova, Yu A.; Menshakov, A. I.
VIII International Young Researchers'' Conference - Physics, Technology, Innovations, PTI 2021. ред. / Vladimir A. Volkovich; Ilya V. Kashin; Andrey A. Smirnov; Evgeniy D. Narkhov. American Institute of Physics Inc., 2022. 030018 (AIP Conference Proceedings; Том 2466).

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Bryuhanova, YA & Menshakov, AI 2022, Characteristics of the method of deposition of TiN coatings by anodic evaporation of titanium in a low-pressure arc discharge. в VA Volkovich, IV Kashin, AA Smirnov & ED Narkhov (ред.), VIII International Young Researchers'' Conference - Physics, Technology, Innovations, PTI 2021., 030018, AIP Conference Proceedings, Том. 2466, American Institute of Physics Inc. https://doi.org/10.1063/5.0088745

Bryuhanova, Y. A., & Menshakov, A. I. (2022). Characteristics of the method of deposition of TiN coatings by anodic evaporation of titanium in a low-pressure arc discharge. в V. A. Volkovich, I. V. Kashin, A. A. Smirnov, & E. D. Narkhov (Ред.), VIII International Young Researchers'' Conference - Physics, Technology, Innovations, PTI 2021 [030018] (AIP Conference Proceedings; Том 2466). American Institute of Physics Inc.. https://doi.org/10.1063/5.0088745

Bryuhanova YA , Menshakov AI. Characteristics of the method of deposition of TiN coatings by anodic evaporation of titanium in a low-pressure arc discharge. в Volkovich VA, Kashin IV, Smirnov AA, Narkhov ED, Редакторы, VIII International Young Researchers'' Conference - Physics, Technology, Innovations, PTI 2021. American Institute of Physics Inc. 2022. 030018. (AIP Conference Proceedings). doi: 10.1063/5.0088745

Bryuhanova, Yu A. ; Menshakov, A. I. / Characteristics of the method of deposition of TiN coatings by anodic evaporation of titanium in a low-pressure arc discharge. VIII International Young Researchers'' Conference - Physics, Technology, Innovations, PTI 2021. Редактор / Vladimir A. Volkovich ; Ilya V. Kashin ; Andrey A. Smirnov ; Evgeniy D. Narkhov. American Institute of Physics Inc., 2022. (AIP Conference Proceedings).

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