Standard
A novel method of silicon synthesis by CVD. /
Shishkin, R. A.; Kudyakova, V. S.; Yuferov, Yu V. и др.
Physics, Technologies and Innovation, PTI 2019: Proceedings of the VI International Young Researchers Conference. ред. / Vladimir A. Volkovich; Sergey V. Zvonarev; Ilya V. Kashin; Andrey A. Smirnov; Evgeniy D. Narkhov. American Institute of Physics Inc., 2019. 020063 (AIP Conference Proceedings; Том 2174).
Результаты исследований: Глава в книге, отчете, сборнике статей › Материалы конференции › Рецензирование
Harvard
Shishkin, RA, Kudyakova, VS, Yuferov, YV & Zykov, FM 2019,
A novel method of silicon synthesis by CVD. в VA Volkovich, SV Zvonarev, IV Kashin, AA Smirnov & ED Narkhov (ред.),
Physics, Technologies and Innovation, PTI 2019: Proceedings of the VI International Young Researchers Conference., 020063, AIP Conference Proceedings, Том. 2174, American Institute of Physics Inc., 6th International Young Researchers'' Conference on Physics, Technologies and Innovation, PTI 2019, Ekaterinburg, Российская Федерация,
20/05/2019.
https://doi.org/10.1063/1.5134214
APA
Shishkin, R. A., Kudyakova, V. S., Yuferov, Y. V., & Zykov, F. M. (2019).
A novel method of silicon synthesis by CVD. в V. A. Volkovich, S. V. Zvonarev, I. V. Kashin, A. A. Smirnov, & E. D. Narkhov (Ред.),
Physics, Technologies and Innovation, PTI 2019: Proceedings of the VI International Young Researchers Conference [020063] (AIP Conference Proceedings; Том 2174). American Institute of Physics Inc..
https://doi.org/10.1063/1.5134214
Vancouver
Shishkin RA, Kudyakova VS, Yuferov YV, Zykov FM.
A novel method of silicon synthesis by CVD. в Volkovich VA, Zvonarev SV, Kashin IV, Smirnov AA, Narkhov ED, Редакторы, Physics, Technologies and Innovation, PTI 2019: Proceedings of the VI International Young Researchers Conference. American Institute of Physics Inc. 2019. 020063. (AIP Conference Proceedings). doi: 10.1063/1.5134214
Author
BibTeX
@inproceedings{418b22673cfe4569b0674a072d781842,
title = "A novel method of silicon synthesis by CVD",
author = "Shishkin, {R. A.} and Kudyakova, {V. S.} and Yuferov, {Yu V.} and Zykov, {F. M.}",
year = "2019",
month = dec,
day = "6",
doi = "10.1063/1.5134214",
language = "English",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
editor = "Volkovich, {Vladimir A.} and Zvonarev, {Sergey V.} and Kashin, {Ilya V.} and Smirnov, {Andrey A.} and Narkhov, {Evgeniy D.}",
booktitle = "Physics, Technologies and Innovation, PTI 2019",
address = "United States",
note = "6th International Young Researchers'' Conference on Physics, Technologies and Innovation, PTI 2019 ; Conference date: 20-05-2019 Through 23-05-2019",
}
RIS
TY - GEN
T1 - A novel method of silicon synthesis by CVD
AU - Shishkin, R. A.
AU - Kudyakova, V. S.
AU - Yuferov, Yu V.
AU - Zykov, F. M.
PY - 2019/12/6
Y1 - 2019/12/6
UR - http://www.scopus.com/inward/record.url?scp=85076600029&partnerID=8YFLogxK
UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000618895900063
U2 - 10.1063/1.5134214
DO - 10.1063/1.5134214
M3 - Conference contribution
AN - SCOPUS:85076600029
T3 - AIP Conference Proceedings
BT - Physics, Technologies and Innovation, PTI 2019
A2 - Volkovich, Vladimir A.
A2 - Zvonarev, Sergey V.
A2 - Kashin, Ilya V.
A2 - Smirnov, Andrey A.
A2 - Narkhov, Evgeniy D.
PB - American Institute of Physics Inc.
T2 - 6th International Young Researchers'' Conference on Physics, Technologies and Innovation, PTI 2019
Y2 - 20 May 2019 through 23 May 2019
ER -
