Research output: Chapter in Book/Report/Conference proceeding › Chapter
Research output: Chapter in Book/Report/Conference proceeding › Chapter
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TY - CHAP
T1 - THIN FILMS OF WIDE BAND GAP II-VI SEMICONDUCTOR COMPOUNDS: FEATURES OF PREPARATION
T2 - book chapter
AU - Markov, V. F.
AU - Korotcenkov, G.
AU - Maskaeva, L. N.
N1 - G. Korotcenkov is grateful to the State Program of the Republic of Moldova, project 20.80009.5007.02, for supporting his research.
PY - 2023
Y1 - 2023
N2 - The chapter describes the most common and effective methods of obtaining of II-VI semiconductor compounds (CdS, CdSe, CdTe, ZnS, ZnSe, ZnTe) thin films for modern optoelectronic devices and production of chemical sensors. Special attention is paid to such methods as vacuum thermal deposition and its varieties which differ in ways of sputtering of the precursor material, magnetron sputtering, chemical vapor deposition, epitaxial deposition, ion beam sputtering, chemical bath deposition, aerosol spray pyrolysis, electrochemical deposition, and some other methods that have been developed recently. Physics and chemistry of the methods, process characteristics, necessary equipment, conditions and models of film deposition, common features of II-VI semiconductor film synthesis, and advantages and disadvantages leading to the quality degradation are presented for each method. The focus is made on the evaluation of the influence of the process parameters and conditions on the semiconductive and functional (optic, photoelectric) properties of the films, providing the achievement of sensor characteristics maximum for effective practical use of II-VI compounds. In this aspect, characteristic examples are given for a number of compounds on the effect of the production conditions on the kinetic, structural, semiconductor, and optical characteristics of the deposited films.
AB - The chapter describes the most common and effective methods of obtaining of II-VI semiconductor compounds (CdS, CdSe, CdTe, ZnS, ZnSe, ZnTe) thin films for modern optoelectronic devices and production of chemical sensors. Special attention is paid to such methods as vacuum thermal deposition and its varieties which differ in ways of sputtering of the precursor material, magnetron sputtering, chemical vapor deposition, epitaxial deposition, ion beam sputtering, chemical bath deposition, aerosol spray pyrolysis, electrochemical deposition, and some other methods that have been developed recently. Physics and chemistry of the methods, process characteristics, necessary equipment, conditions and models of film deposition, common features of II-VI semiconductor film synthesis, and advantages and disadvantages leading to the quality degradation are presented for each method. The focus is made on the evaluation of the influence of the process parameters and conditions on the semiconductive and functional (optic, photoelectric) properties of the films, providing the achievement of sensor characteristics maximum for effective practical use of II-VI compounds. In this aspect, characteristic examples are given for a number of compounds on the effect of the production conditions on the kinetic, structural, semiconductor, and optical characteristics of the deposited films.
UR - https://www.elibrary.ru/item.asp?id=59929558
U2 - 10.1007/978-3-031-19531-0_10
DO - 10.1007/978-3-031-19531-0_10
M3 - Chapter
SN - 978-3-031-19530-3
VL - Том. 1. Materials and Technology
SP - 233
EP - 275
BT - HANDBOOK OF II-VI SEMICONDUCTOR-BASED SENSORS AND RADIATION DETECTORS
A2 - KOROTCENKOV, G.
PB - Springer
CY - Cham
ER -
ID: 52449575