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Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3 PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge. / Gavrilov, Nikolay; Kamenetskikh, Alexander; Tretnikov, Petr et al.
In: Membranes, Vol. 12, No. 1, 40, 01.2022.

Research output: Contribution to journal › Article › peer-review

Harvard

Gavrilov, N, Kamenetskikh, A, Tretnikov, P, Nikonov, A, Sinelnikov, L, Butakov, D, Nikolkin, V & Chukin, A 2022, 'Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3 PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge', Membranes, vol. 12, no. 1, 40. https://doi.org/10.3390/membranes12010040

APA

Gavrilov, N., Kamenetskikh, A., Tretnikov, P., Nikonov, A., Sinelnikov, L., Butakov, D., Nikolkin, V., & Chukin, A. (2022). Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3 PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge. Membranes, 12(1), [40]. https://doi.org/10.3390/membranes12010040

Vancouver

Gavrilov N, Kamenetskikh A, Tretnikov P, Nikonov A, Sinelnikov L, Butakov D et al. Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3 PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge. Membranes. 2022 Jan;12(1):40. doi: 10.3390/membranes12010040

Author

Gavrilov, Nikolay ; Kamenetskikh, Alexander ; Tretnikov, Petr et al. / Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3 PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge. In: Membranes. 2022 ; Vol. 12, No. 1.

BibTeX

@article{bf45bdb653474d999c3604f7fe57fc28,
title = "Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3 PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge",
keywords = "Anodic evaporation, LiPON thin films, Low-pressure arc, Plasma diagnostic, DISSOCIATION, ASSISTED DEPOSITION, CONDUCTIVITY, plasma diagnostic, HEATED HOLLOW-CATHODE, low-pressure arc, anodic evaporation",
author = "Nikolay Gavrilov and Alexander Kamenetskikh and Petr Tretnikov and Alexey Nikonov and Leonid Sinelnikov and Denis Butakov and Viktor Nikolkin and Andrey Chukin",
note = "Publisher Copyright: {\textcopyright} 2021 by the authors. Licensee MDPI, Basel, Switzerland.",
year = "2022",
month = jan,
doi = "10.3390/membranes12010040",
language = "English",
volume = "12",
journal = "Membranes",
issn = "2077-0375",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "1",

}

RIS

TY - JOUR

T1 - Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3 PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge

AU - Gavrilov, Nikolay

AU - Kamenetskikh, Alexander

AU - Tretnikov, Petr

AU - Nikonov, Alexey

AU - Sinelnikov, Leonid

AU - Butakov, Denis

AU - Nikolkin, Viktor

AU - Chukin, Andrey

N1 - Publisher Copyright: © 2021 by the authors. Licensee MDPI, Basel, Switzerland.

PY - 2022/1

Y1 - 2022/1

KW - Anodic evaporation

KW - LiPON thin films

KW - Low-pressure arc

KW - Plasma diagnostic

KW - DISSOCIATION

KW - ASSISTED DEPOSITION

KW - CONDUCTIVITY

KW - plasma diagnostic

KW - HEATED HOLLOW-CATHODE

KW - low-pressure arc

KW - anodic evaporation

UR - http://www.scopus.com/inward/record.url?scp=85122131553&partnerID=8YFLogxK

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000747770600001

UR - https://elibrary.ru/item.asp?id=47551335

U2 - 10.3390/membranes12010040

DO - 10.3390/membranes12010040

M3 - Article

AN - SCOPUS:85122131553

VL - 12

JO - Membranes

JF - Membranes

SN - 2077-0375

IS - 1

M1 - 40

ER -

ID: 29214193