Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3 PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge › Research Explorer

Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li₃ PO₄ Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge

Research output: Contribution to journal › Article › peer-review

DOI

https://doi.org/10.3390/membranes12010040
Final published version

Nikolay Gavrilov
Alexander Kamenetskikh
Petr Tretnikov
Alexey Nikonov
Leonid Sinelnikov
Denis Butakov
Viktor Nikolkin
Andrey Chukin

Original language	English
Article number	40
Number of pages	12
Journal	Membranes
Volume	12
Issue number	1
DOIs	https://doi.org/10.3390/membranes12010040
Publication status	Published - Jan 2022

WoS ResearchAreas Categories

Biochemistry & Molecular Biology
Chemistry, Physical
Engineering, Chemical
Materials Science, Multidisciplinary
Polymer Science

ASJC Scopus subject areas

Chemical Engineering (miscellaneous)
Process Chemistry and Technology
Filtration and Separation

Research areas

Anodic evaporation, LiPON thin films, Low-pressure arc, Plasma diagnostic, DISSOCIATION, ASSISTED DEPOSITION, CONDUCTIVITY, plasma diagnostic, HEATED HOLLOW-CATHODE, low-pressure arc, anodic evaporation

ID: 29214193