We propose a method for obtaining TiN coatings by reactive anodic evaporation of titanium using a high-current (30 A) discharge with a self-heated hollow cathode in an Ar + N2 gas mixture. The optical spectral analysis shows that the gas-discharge plasma contains a large amount of activated titanium, while the fraction of singly charged metal ions supplied from the plasma to substrate reaches up to 70%. Titanium coatings with 2-μm thickness and up to 24-GPa hardness were obtained at a nitrogen flow rate of 5 cm3/min. The rate of TiN deposition at a distance of 7 cm from the vapor source amounted to ~4 μm/h.
Original languageEnglish
Pages (from-to)511-514
Number of pages4
JournalTechnical Physics Letters
Volume47
Issue number7
DOIs
Publication statusPublished - Jul 2021

    Research areas

  • PVD, anodic evaporation, self-heated hollow cathode, titanium nitride, PLASMA, DEPOSITION

    WoS ResearchAreas Categories

  • Physics, Applied

    ASJC Scopus subject areas

  • Physics and Astronomy (miscellaneous)

    GRNTI

  • 29.00.00 PHYSICS

    Level of Research Output

  • VAK List

ID: 29481568