Standard

Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films. / Merenkov, I. S.; Katsui, H.; Khomyakov, M. N. et al.
In: Journal of the European Ceramic Society, Vol. 39, No. 16, 01.12.2019, p. 5123-5131.

Research output: Contribution to journal › Article › peer-review

Harvard

Merenkov, IS, Katsui, H, Khomyakov, MN, Sulyaeva, VS, Pushkarev, RV, Tu, R, Goto, T & Kosinova, ML 2019, 'Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films', Journal of the European Ceramic Society, vol. 39, no. 16, pp. 5123-5131. https://doi.org/10.1016/j.jeurceramsoc.2019.08.006

APA

Merenkov, I. S., Katsui, H., Khomyakov, M. N., Sulyaeva, V. S., Pushkarev, R. V., Tu, R., Goto, T., & Kosinova, M. L. (2019). Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films. Journal of the European Ceramic Society, 39(16), 5123-5131. https://doi.org/10.1016/j.jeurceramsoc.2019.08.006

Vancouver

Merenkov IS, Katsui H, Khomyakov MN, Sulyaeva VS, Pushkarev RV, Tu R et al. Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films. Journal of the European Ceramic Society. 2019 Dec 1;39(16):5123-5131. doi: 10.1016/j.jeurceramsoc.2019.08.006

Author

Merenkov, I. S. ; Katsui, H. ; Khomyakov, M. N. et al. / Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films. In: Journal of the European Ceramic Society. 2019 ; Vol. 39, No. 16. pp. 5123-5131.

BibTeX

@article{b1ca73971cf045059db415faf122b0f2,
title = "Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films",
keywords = "Boron carbide, Hard coatings, Laser chemical vapor deposition, Silicon carbide, Synergetic effect, THIN-FILMS, OXIDATION, BORON, CHEMICAL-VAPOR-DEPOSITION, C-N FILMS, GRAPHENE, MECHANICAL-PROPERTIES, CVD PROCESS, TEMPERATURE, COATINGS",
author = "Merenkov, {I. S.} and H. Katsui and Khomyakov, {M. N.} and Sulyaeva, {V. S.} and Pushkarev, {R. V.} and R. Tu and T. Goto and Kosinova, {M. L.}",
year = "2019",
month = dec,
day = "1",
doi = "10.1016/j.jeurceramsoc.2019.08.006",
language = "English",
volume = "39",
pages = "5123--5131",
journal = "Journal of the European Ceramic Society",
issn = "0955-2219",
publisher = "Elsevier",
number = "16",

}

RIS

TY - JOUR

T1 - Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films

AU - Merenkov, I. S.

AU - Katsui, H.

AU - Khomyakov, M. N.

AU - Sulyaeva, V. S.

AU - Pushkarev, R. V.

AU - Tu, R.

AU - Goto, T.

AU - Kosinova, M. L.

PY - 2019/12/1

Y1 - 2019/12/1

KW - Boron carbide

KW - Hard coatings

KW - Laser chemical vapor deposition

KW - Silicon carbide

KW - Synergetic effect

KW - THIN-FILMS

KW - OXIDATION

KW - BORON

KW - CHEMICAL-VAPOR-DEPOSITION

KW - C-N FILMS

KW - GRAPHENE

KW - MECHANICAL-PROPERTIES

KW - CVD PROCESS

KW - TEMPERATURE

KW - COATINGS

UR - http://www.scopus.com/inward/record.url?scp=85070411132&partnerID=8YFLogxK

UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000488140300003

U2 - 10.1016/j.jeurceramsoc.2019.08.006

DO - 10.1016/j.jeurceramsoc.2019.08.006

M3 - Article

AN - SCOPUS:85070411132

VL - 39

SP - 5123

EP - 5131

JO - Journal of the European Ceramic Society

JF - Journal of the European Ceramic Society

SN - 0955-2219

IS - 16

ER -

ID: 10767843