Extraordinary synergetic effect of precursors in laser CVD deposition of SiBCN films

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	5123-5131
Number of pages	9
Journal	Journal of the European Ceramic Society
Volume	39
Issue number	16
DOIs	https://doi.org/10.1016/j.jeurceramsoc.2019.08.006
Publication status	Published - 1 Dec 2019

Boron carbide, Hard coatings, Laser chemical vapor deposition, Silicon carbide, Synergetic effect, THIN-FILMS, OXIDATION, BORON, CHEMICAL-VAPOR-DEPOSITION, C-N FILMS, GRAPHENE, MECHANICAL-PROPERTIES, CVD PROCESS, TEMPERATURE, COATINGS

ID: 10767843