DOI

Original languageEnglish
Article number061208
JournalJournal of Vacuum Science and Technology B: Nanotechnology and Microelectronics
Volume36
Issue number6
DOIs
Publication statusPublished - 1 Nov 2018

    WoS ResearchAreas Categories

  • Engineering, Electrical & Electronic
  • Nanoscience & Nanotechnology
  • Physics, Applied

    ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Process Chemistry and Technology
  • Surfaces, Coatings and Films
  • Electrical and Electronic Engineering
  • Materials Chemistry

ID: 8332270