Research output: Contribution to journal › Article › peer-review
Translated title of the contribution | Investigation of TiAlSiN Coatings Deposited by Reactive Magnetron Sputtering under High-Current Ion Assistance |
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Original language | Russian |
Pages (from-to) | 106-112 |
Number of pages | 7 |
Journal | Поверхность. Рентгеновские, синхротронные и нейтронные исследования |
Issue number | 6 |
DOIs | |
Publication status | Published - 2017 |
ID: 1996022