Research output: Contribution to journal › Review article › peer-review
Research output: Contribution to journal › Review article › peer-review
}
TY - JOUR
T1 - The advanced aluminum nitride synthesis methods and its applications: Patent review
AU - Shishkin, Roman A.
AU - Elagin, Andrey A.
AU - Mayorova, Ekaterina S.
AU - Beketov, Askold R.
PY - 2016/8/1
Y1 - 2016/8/1
KW - Aluminum
KW - application
KW - carbothermal
KW - chemical purity
KW - CVD
KW - direct nitridation
KW - gas-phase synthesis
KW - nitride
KW - reduction
KW - synthesis
KW - thermal conductivity
KW - GAS-PHASE METHOD
UR - http://www.scopus.com/inward/record.url?scp=84978300182&partnerID=8YFLogxK
UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000378917100004
U2 - 10.2174/1872210510999160414150634
DO - 10.2174/1872210510999160414150634
M3 - Review article
VL - 10
SP - 146
EP - 156
JO - Recent Patents on Nanotechnology
JF - Recent Patents on Nanotechnology
SN - 1872-2105
IS - 2
ER -
ID: 1054341