Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review
Original language | English |
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Title of host publication | FUNDAMENTALS OF LASER-ASSISTED MICRO- AND NANOTECHNOLOGIES 2013 |
Editors | VP Veiko, TA Vartanyan |
Publisher | The International Society for Optical Engineering |
Number of pages | 8 |
Volume | 9065 |
ISBN (Print) | 9780819499929 |
DOIs | |
Publication status | Published - 2013 |
Event | Conference on Fundamentals of Laser-Assisted Micro- and Nanotechnologies - Pushkin Duration: 24 Jun 2013 → 28 Jun 2013 |
Name | Proceedings of SPIE |
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Publisher | The International Society for Optical Engineering |
Volume | 9065 |
ISSN (Print) | 0277-786X |
Conference | Conference on Fundamentals of Laser-Assisted Micro- and Nanotechnologies |
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City | Pushkin |
Period | 24/06/2013 → 28/06/2013 |
ID: 899608