A method is proposed, with the corresponding electronic instrumentation and a narrow-slit (10 μm) detector, for the measurement of profiles of ribbon-shaped beams of hydrogen atoms with 0.7-15 MeV energies, scattered in a thin (below I μg/cm2) gas target. The measurements are performed by moving the detector across the beam with the aid of a step motor and counting particles at each point of the profile. The composite collimator design allows the measuring detector to also be used in the beam monitoring regime. For a minimum step of 1.6 μm and a drift base of scattered particles about 10 m, information on the beam profile is obtained with an angular resolution better than 3 × 10-6 rad. Various factors affecting the accuracy of measurements of the particle beam profile are considered, and selection of the optimum conditions is discussed. The method was used for the profiling of both neutral and charged beam components in order to determine the cross-sections and characteristic angles of scattering. © 1997 MAEe cyrillic signK Hayκa/Interperiodica Publishing.