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Harvard
Dmitriev, AS & Menshakov, AI 2019,
Low-energy electron beam application for SiCN-based coatings deposition. in VA Volkovich, SV Zvonarev, IV Kashin, AA Smirnov & ED Narkhov (eds),
Physics, Technologies and Innovation, PTI 2019: Proceedings of the VI International Young Researchers Conference., 020095, AIP Conference Proceedings, vol. 2174, American Institute of Physics Inc., 6th International Young Researchers'' Conference on Physics, Technologies and Innovation, PTI 2019, Ekaterinburg, Russian Federation,
20/05/2019.
https://doi.org/10.1063/1.5134246
APA
Dmitriev, A. S., & Menshakov, A. I. (2019).
Low-energy electron beam application for SiCN-based coatings deposition. In V. A. Volkovich, S. V. Zvonarev, I. V. Kashin, A. A. Smirnov, & E. D. Narkhov (Eds.),
Physics, Technologies and Innovation, PTI 2019: Proceedings of the VI International Young Researchers Conference [020095] (AIP Conference Proceedings; Vol. 2174). American Institute of Physics Inc..
https://doi.org/10.1063/1.5134246
Vancouver
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BibTeX
@inproceedings{f536a0bc4ed64ea3a7704669b7c0521e,
title = "Low-energy electron beam application for SiCN-based coatings deposition",
author = "Dmitriev, {A. S.} and Menshakov, {A. I.}",
year = "2019",
month = dec,
day = "6",
doi = "10.1063/1.5134246",
language = "English",
series = "AIP Conference Proceedings",
publisher = "American Institute of Physics Inc.",
editor = "Volkovich, {Vladimir A.} and Zvonarev, {Sergey V.} and Kashin, {Ilya V.} and Smirnov, {Andrey A.} and Narkhov, {Evgeniy D.}",
booktitle = "Physics, Technologies and Innovation, PTI 2019",
address = "United States",
note = "6th International Young Researchers'' Conference on Physics, Technologies and Innovation, PTI 2019 ; Conference date: 20-05-2019 Through 23-05-2019",
}
RIS
TY - GEN
T1 - Low-energy electron beam application for SiCN-based coatings deposition
AU - Dmitriev, A. S.
AU - Menshakov, A. I.
PY - 2019/12/6
Y1 - 2019/12/6
UR - http://www.scopus.com/inward/record.url?scp=85076596522&partnerID=8YFLogxK
UR - https://gateway.webofknowledge.com/gateway/Gateway.cgi?GWVersion=2&SrcAuth=tsmetrics&SrcApp=tsm_test&DestApp=WOS_CPL&DestLinkType=FullRecord&KeyUT=000618895900095
U2 - 10.1063/1.5134246
DO - 10.1063/1.5134246
M3 - Conference contribution
AN - SCOPUS:85076596522
T3 - AIP Conference Proceedings
BT - Physics, Technologies and Innovation, PTI 2019
A2 - Volkovich, Vladimir A.
A2 - Zvonarev, Sergey V.
A2 - Kashin, Ilya V.
A2 - Smirnov, Andrey A.
A2 - Narkhov, Evgeniy D.
PB - American Institute of Physics Inc.
T2 - 6th International Young Researchers'' Conference on Physics, Technologies and Innovation, PTI 2019
Y2 - 20 May 2019 through 23 May 2019
ER -