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INVESTIGATION OF TIС/A-C:H COATINGS PREPARED BY REACTIVE MAGNETRON SPUTTERING IN NONSELF-SUSTAINED PLASMA CATHODE DISCHARGE. / Kamenetskih, A. S.; Gavrilov, N. V.; Kuznetsov, M. V. et al.
In: Известия вузов. Физика, Vol. 55, No. 12-2, 2012, p. 141-144.

Research output: Contribution to journal › Article › peer-review

Harvard

Kamenetskih, AS, Gavrilov, NV, Kuznetsov, MV, Chukin, AV & Shishkina, EV 2012, 'INVESTIGATION OF TIС/A-C:H COATINGS PREPARED BY REACTIVE MAGNETRON SPUTTERING IN NONSELF-SUSTAINED PLASMA CATHODE DISCHARGE', Известия вузов. Физика, vol. 55, no. 12-2, pp. 141-144.

APA

Kamenetskih, A. S., Gavrilov, N. V., Kuznetsov, M. V., Chukin, A. V., & Shishkina, E. V. (2012). INVESTIGATION OF TIС/A-C:H COATINGS PREPARED BY REACTIVE MAGNETRON SPUTTERING IN NONSELF-SUSTAINED PLASMA CATHODE DISCHARGE. Известия вузов. Физика, 55(12-2), 141-144.

Vancouver

Kamenetskih AS, Gavrilov NV, Kuznetsov MV, Chukin AV, Shishkina EV. INVESTIGATION OF TIС/A-C:H COATINGS PREPARED BY REACTIVE MAGNETRON SPUTTERING IN NONSELF-SUSTAINED PLASMA CATHODE DISCHARGE. Известия вузов. Физика. 2012;55(12-2):141-144.

Author

Kamenetskih, A. S. ; Gavrilov, N. V. ; Kuznetsov, M. V. et al. / INVESTIGATION OF TIС/A-C:H COATINGS PREPARED BY REACTIVE MAGNETRON SPUTTERING IN NONSELF-SUSTAINED PLASMA CATHODE DISCHARGE. In: Известия вузов. Физика. 2012 ; Vol. 55, No. 12-2. pp. 141-144.

BibTeX

@article{1494c890e2e14219a9227650337e6c10,
title = "INVESTIGATION OF TIС/A-C:H COATINGS PREPARED BY REACTIVE MAGNETRON SPUTTERING IN NONSELF-SUSTAINED PLASMA CATHODE DISCHARGE",
abstract = "Nanocomposite coatings based on crystalline TiC phase with 3-8 nm grain size embedded in an amorphous hydrocarbon a-C:H matrix are deposited by pulsed magnetron sputtering of Ti-target in Ar/C 2H 2 gas mixture ionized by pulse (50 kHz, 10 μs) low-energy (100-400 eV) electron beam. The effects of acetylene flow rate, substrate bias and ion current density on composition and hardness of the coatings have been investigated by XRD, XPS and indentation tests. The hardness of TiC/a-C:H coatings raised by 20 % then ion current density increased by 30 % due to increasing of electron beam current up to 1 A. Adhesive coatings with 5 μm thick, hardness of ~ 5-35 GPa and deposition rate of 1.4 1.9 μm/h have been obtained.",
author = "Kamenetskih, {A. S.} and Gavrilov, {N. V.} and Kuznetsov, {M. V.} and Chukin, {A. V.} and Shishkina, {E. V.}",
year = "2012",
language = "English",
volume = "55",
pages = "141--144",
journal = "Известия вузов. Физика",
issn = "0021-3411",
publisher = "Национальный исследовательский Томский государственный университет",
number = "12-2",

}

RIS

TY - JOUR

T1 - INVESTIGATION OF TIС/A-C:H COATINGS PREPARED BY REACTIVE MAGNETRON SPUTTERING IN NONSELF-SUSTAINED PLASMA CATHODE DISCHARGE

AU - Kamenetskih, A. S.

AU - Gavrilov, N. V.

AU - Kuznetsov, M. V.

AU - Chukin, A. V.

AU - Shishkina, E. V.

PY - 2012

Y1 - 2012

N2 - Nanocomposite coatings based on crystalline TiC phase with 3-8 nm grain size embedded in an amorphous hydrocarbon a-C:H matrix are deposited by pulsed magnetron sputtering of Ti-target in Ar/C 2H 2 gas mixture ionized by pulse (50 kHz, 10 μs) low-energy (100-400 eV) electron beam. The effects of acetylene flow rate, substrate bias and ion current density on composition and hardness of the coatings have been investigated by XRD, XPS and indentation tests. The hardness of TiC/a-C:H coatings raised by 20 % then ion current density increased by 30 % due to increasing of electron beam current up to 1 A. Adhesive coatings with 5 μm thick, hardness of ~ 5-35 GPa and deposition rate of 1.4 1.9 μm/h have been obtained.

AB - Nanocomposite coatings based on crystalline TiC phase with 3-8 nm grain size embedded in an amorphous hydrocarbon a-C:H matrix are deposited by pulsed magnetron sputtering of Ti-target in Ar/C 2H 2 gas mixture ionized by pulse (50 kHz, 10 μs) low-energy (100-400 eV) electron beam. The effects of acetylene flow rate, substrate bias and ion current density on composition and hardness of the coatings have been investigated by XRD, XPS and indentation tests. The hardness of TiC/a-C:H coatings raised by 20 % then ion current density increased by 30 % due to increasing of electron beam current up to 1 A. Adhesive coatings with 5 μm thick, hardness of ~ 5-35 GPa and deposition rate of 1.4 1.9 μm/h have been obtained.

UR - https://elibrary.ru/item.asp?id=20133329

M3 - Article

VL - 55

SP - 141

EP - 144

JO - Известия вузов. Физика

JF - Известия вузов. Физика

SN - 0021-3411

IS - 12-2

ER -

ID: 9258496