How the angular position of a photomask affects the angular errors of circular optical scales when they are being produced › Research Explorer

How the angular position of a photomask affects the angular errors of circular optical scales when they are being produced

Research output: Contribution to journal › Article › peer-review

DOI

https://doi.org/10.1364/JOT.82.000385
Final published version

Original language	English
Pages (from-to)	385-387
Number of pages	3
Journal	Journal of Optical Technology (A Translation of Opticheskii Zhurnal)
Volume	82
Issue number	6
DOIs	https://doi.org/10.1364/JOT.82.000385
Publication status	Published - Jun 2015

Level of Research Output

VAK List

GRNTI

29.00.00 PHYSICS

ASJC Scopus subject areas

Applied Mathematics
Computational Mathematics
Engineering(all)
Atomic and Molecular Physics, and Optics

Research areas

LIFT-OFF PHOTOLITHOGRAPHY, LASER IMAGE GENERATOR

ID: 295333