Original languageEnglish
Article number012082
Number of pages7
JournalJournal of Physics: Conference Series
Volume1393
Issue number1
DOIs
Publication statusPublished - 28 Nov 2019
Event14th International Conference on Gas Discharge Plasmas and Their Applications, GDP 2019 - Tomsk, Russian Federation
Duration: 15 Sept 201921 Sept 2019

    ASJC Scopus subject areas

  • Physics and Astronomy(all)

    WoS ResearchAreas Categories

  • Physics, Fluids & Plasmas

    Research areas

  • GRAIN-GROWTH, FILMS, ALPHA-AL2O3, DEPOSITION, ARC, EVAPORATION

ID: 11898892