Research output: Contribution to journal › Conference article › peer-review
| Original language | English |
|---|---|
| Article number | 012011 |
| Journal | Journal of Physics: Conference Series |
| Volume | 1799 |
| Issue number | 1 |
| DOIs | |
| Publication status | Published - 11 Mar 2021 |
| Event | 27th International Conference on Vacuum Technique and Technology, VTT 2020 - Saint Petersburg, Virtual, Russian Federation Duration: 27 Oct 2020 → 29 Oct 2020 |
ID: 21179812