A role of surplus vacancies, big stress gradients and chemical potentials of vacancies, originating in the vicinity of the dislocation walls and deformation boundaries, in activation of diffusion processes is considered. The latter introduce an essential contribution into structure forming under metal (copper for example) intensive cold plastic deformation. An evolution of lattice properties, annihilation of dislocations and them transformation into grain-boundary dislocations are studied. The phenomena, proceeding within and in walls of dislocation cells, are analyzed and inference is made that the diffusion mass transfer is activated under intensive cold plastic deformation.