The problems related to the cleaning procedure (surface preparation) of optical components at production facilities are discussed. Many of the considered methods are outdated and do not comply with the requirements of technological procedures performed in cleanrooms. We establish that hydromechanical cleaning makes it possible to obtain surfaces of optical components with hydrophilic properties, and this method can be applied in cleanrooms for manufacturing components with the 0th surface finish class of polished surfaces.
Translated title of the contributionINFLUENCE OF THE CLEANING METHOD ON THE QUALITY OF PREPARATION OF SURFACES OF OPTICAL COMPONENTS
Original languageRussian
Pages (from-to)77-81
Number of pages5
JournalОптический журнал
Volume88
Issue number7
DOIs
Publication statusPublished - 2021

    GRNTI

  • 29.00.00 PHYSICS

    Level of Research Output

  • VAK List
  • Russian Science Citation Index

ID: 29305260