Research output: Patent
Translated title of the contribution | SOLUTION FOR HYDROCHEMICAL SEDIMENTATION OF SEMI-CONDUCTOR FILMS OF INDIUM SULPHIDE: patent of invention |
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Original language | Russian |
Patent number | 2533888 |
IPC | C01G 1/12,C01G 15/00,H01L 21/00 |
Filing date | 15/07/2013 |
Publication status | Published - 27 Nov 2014 |
ID: 11073999