FIELD: chemistry.
SUBSTANCE: solution contains indium (III) salt, tartaric acid, thioacetamide, hydroxylamine hydrochloride with the following reagent concentration, mol/l: indium(III) salt - 0.01-0.2; thioacetamide - 0.01-0.5; tartaric acid - 0.005-0.2; hydroxylamine hydrochloride - 0.005-0.15.
EFFECT: invention makes it possible to obtain films of indium sulphide, which are characterised by higher values of thickness with the simultaneous preservation of high quality of the film surface.
Translated title of the contributionSOLUTION FOR HYDROCHEMICAL SEDIMENTATION OF SEMI-CONDUCTOR FILMS OF INDIUM SULPHIDE: patent of invention
Original languageRussian
Patent number2533888
IPCC01G 1/12,C01G 15/00,H01L 21/00
Filing date15/07/2013
Publication statusPublished - 27 Nov 2014

ID: 11073999