The silicide particles formation in the heat-resistant titanium alloys has been discussed. It was shown that depending on the temperature-time parameters of treatment (Ti, Zr) 5Si 3 (S 1) particles are formed primarily at interface α/β boundaries, and (Ti, Zr) 6Si 3 (S 2) and (Ti, Zr) 2Si (S 3) particles are formed in the α-phase. The effect of the silicide particles on the α 2-phase has been analyzed.