Graphene is a new material in which the unique physical properties have recently been revealed: from the immense mobility of charge carriers and thermal conductivity to the ability to withstand huge deformations before destruction. In the initial state, graphene is a centrosymmetric semimetal, and the piezoelectric effect in it must be absent by definition. Recent theoretical work has shown that graphene can be a noncentrosymmetric semiconductor in the presence of impurities and defects, as well as a gradient of deformation in the lattice. Experimental confirmation of the presence of a strong piezoelectric effect obtained in two papers (including the team members of the applicants of this project) requires a detailed study of the piezoelectric properties as a function of the state of the surface and the thickness of the layers in the heterostructure. This project assumes not only the creation of such layers, but also the confirmation of the piezoelectric properties of graphene structures deposited on thin membranes in order to study resonance phenomena and the possibility of their applications in micromechanical devices.